To provide a stable and no vibration environment for the Mask
Aligner on its top which could also reduce the shift issue in
between after the alignment procedure is done.

Vibration-proof table

To provide a stable and vibration-proof environment , so that Mask Aligner could be vibration proof even under the high image magnification rate.

防震桌

 


Alignment Tool

Our Alignment tool can retrofit or integrate into varies type of
Mask Aligner upon customer's further request.

對準夾製具

 


Mercury Lamp

M&R has our own mercury lamp stock for varies type of brand (Like USHIO, ARC) & varies power lamp for all kind of Mask Aligner system such as AG, ABM, Quintel, OAI , Cannon ,….etc

•Near UV Short Arc Lamps:
200W, 350W, 500W, 1,000W, 1,600, 2,000, 3,500, and 5,000W Versions

 

•Mid UV Short Arc Lamps:
350W, 500W, 1,000W, and 2,000W Versions

 

Deep UV Short Arc Lamps:
350W, 500W, 1,000W, and 2,000W Versions

 

Deep UV Grid Lamps

 

汞燈