高壓汞燈

Application:

  • Semiconductor
  • Display(TFT,TP = touch Panel, OLED)
  • LED
  • MEMS(Bio Chips, NDA Chips, Micro-sensor, Micro-actuators)
  • Passive components(mini-PR, capacitor, conductors)
  • Solar Cell( GaAs)

Specification:

Exposure light source:

350W, 500W, 1KW, 2kw, 5kw

Substrate size:

2”~24”

Uniformity:

> ± 3% and < ±5%

Alignment Accuracy:

± 1um