正/負形光阻Chemical

基本規格 :

  1. SU8 1040 (厚高深寬比負光阻 0.8 to 10μm)
  2. SU81060 (厚高深寬比負光阻 6.0 to 50μm)
  3. SU81070 (厚高深寬比負光阻 15 to 200μm)
  4. SU81075 (厚高深寬比負光阻 >100μm)
  5. SU8 Developer (顯影液)
  6. SU8 Stripper (去光阻液)
  7. D-35 (Metal Ion 無機濃縮顯影液)
  8. DS-10 (PC-60i &20i去光阻液 & NPR-10D顯影液)
  9. VLSI-237 (Metal Ion Free有機顯影液)
  10. NPR-20 (Negative Photoresist 負光阻)
  11. NPR-2500F (Negative Photoresist 耐酸負光阻)
  12. NPR-7000F (Negative Photoresist 耐酸負光阻)
  13. PR-10 (Positive Photoresist正光阻)
  14. PC-20i (Protective Coating樹脂保護膠)
  15. S-100 (正負兩用光阻剝膜液 & PC-20i有機剝膜液)
  16. S-6000 (Positive & Negative Photoresist 正負光阻)