科毅科技股份有限公司
Ion 40 Plasma System

Ion 40 Plasma System

IoN 40 等離子體系統是一種桶式等離子體反應器，專為研發和生產應用而設計。

該技術基於 International Plasma Corporation、Branson IPC、Dionex、Gasonics、Metroline、TePla 和 PVA TePla 在 50 多年的時間裡開發的經過驗證的反應器設計。

PVA TePla 是一種經過驗證且值得信賴的全球優質、可靠、經濟高效且易於操作的氣體等離子系統的資源。

它為各種應用提供了一些最先進和創新的解決方案。

特點包括：

  • 小腳印桌面設計
  • 即插即用自安裝
  • 柔性電極
  • 帶液晶觸摸屏和鍵盤的工業計算機。
  • 基於 Windows 的操作系統。
  • 圖形用戶界面 (GUI) 軟件符合 CFR Title 21 Part 11 和 Semi E95-1101
  • 多級用戶訪問
  • 軟件
  • 用於快速和多功能步驟控制的配方編輯器
  • 板載診斷功能和報警記錄
  • 通過以太網進行遠程過程監控
  • 基於網絡的在線模擬/培訓/支持

典型應用：

  • 表面清潔
  • 表面活化
  • 表面功能化
  • 矽氧烷和有機薄膜的沉積

PROCESS CHAMBER

  • Material: Aluminum
  • Dimension: 330 mm W x 483mm D x 229mm H
  • (13”x19”x9”)
  • Volume: 36.43 L (1.29 ft3)
  • Electrodes: Removable 5 Shelf
  • Mass Flow Controller (MFC): 1
  • Process Pressure: (0.16 to 2.66 mbar
  • (120 to 2000) mTorr)
  • Base Pressure: 0.07 mbar (50 mTorr)
  • Pumping Time: 1 min (Pump dependent)
  • Loading: Manual

PLASMA GENERATOR

Frequency/Power: 13.56 MHz/300 W

OPTIONS

  • Automated robotic loading/unloading
  • Stainless steel chamber
  • Electrodes:
  • Shelf electrodes 3/5
  • Multi-shelf with 3/5 or 7 shelves
  • Removable 3 shelves
  • Vertical, side wall or ceiling
  • Water cooled—horizontal 3 shelves
  • Powered cage
  • Secondary plasma
  • Faraday/Etch cage
  • Plasma generators
  • 13.56 MHz/600 W
  • (20 to 100) kHz/300 W or 600 W
  • Additional MFCs/up to additional five gasses
  • Corrosive gas MFCs
  • Liquid monomer delivery kits
  • High/Low vapor pressure monomers
  • Process pressure control
  • Light tower with R/Y/G/Buzzer
  • Vacuum pumps (Rotary vane, dry)
  • Gas (H2, N2, O2) generation package
  • SECS/GEM interface

ION 40 PLASMA SYSTEM DIMENSION AND WEIGHT
737 mm W x 663 mm D x 711 mm H (29”x26”x28”)
156.36 kg (345 lb) (Varies with options)
PERFORMANCE DATA
Uptime: 95%
MTBF: >500 h
MTTR: <2 h
FACILITIES REQUIREMENTS
Electricity: (110/220) VAC, 1f, 50/60 Hz, 3 wire,
2.3 kW
Process Gas Input Pressure: 2 bar (30 psi)
Purge Gas Input Pressure: 2 bar (30 psi)
Compressed Air Input Pressure: 6 bar (88 psi)
SAFETY CERTIFICATION STANDARDS
CE certified
EN 61010
EN 61326

Technical Data

PROCESS CHAMBER

  • Material: Aluminum
  • Dimension: 330 mm W x 483mm D x 229mm H
  • (13”x19”x9”)
  • Volume: 36.43 L (1.29 ft3)
  • Electrodes: Removable 5 Shelf
  • Mass Flow Controller (MFC): 1
  • Process Pressure: (0.16 to 2.66 mbar
  • (120 to 2000) mTorr)
  • Base Pressure: 0.07 mbar (50 mTorr)
  • Pumping Time: 1 min (Pump dependent)
  • Loading: Manual

PLASMA GENERATOR

Frequency/Power: 13.56 MHz/300 W

Technical Data

OPTIONS

  • Automated robotic loading/unloading
  • Stainless steel chamber
  • Electrodes:
  • Shelf electrodes 3/5
  • Multi-shelf with 3/5 or 7 shelves
  • Removable 3 shelves
  • Vertical, side wall or ceiling
  • Water cooled—horizontal 3 shelves
  • Powered cage
  • Secondary plasma
  • Faraday/Etch cage
  • Plasma generators
  • 13.56 MHz/600 W
  • (20 to 100) kHz/300 W or 600 W
  • Additional MFCs/up to additional five gasses
  • Corrosive gas MFCs
  • Liquid monomer delivery kits
  • High/Low vapor pressure monomers
  • Process pressure control
  • Light tower with R/Y/G/Buzzer
  • Vacuum pumps (Rotary vane, dry)
  • Gas (H2, N2, O2) generation package
  • SECS/GEM interface

Technical Data

ION 40 PLASMA SYSTEM DIMENSION AND WEIGHT
737 mm W x 663 mm D x 711 mm H (29”x26”x28”)
156.36 kg (345 lb) (Varies with options)
PERFORMANCE DATA
Uptime: 95%
MTBF: >500 h
MTTR: <2 h
FACILITIES REQUIREMENTS
Electricity: (110/220) VAC, 1f, 50/60 Hz, 3 wire,
2.3 kW
Process Gas Input Pressure: 2 bar (30 psi)
Purge Gas Input Pressure: 2 bar (30 psi)
Compressed Air Input Pressure: 6 bar (88 psi)
SAFETY CERTIFICATION STANDARDS
CE certified
EN 61010
EN 61326