Power Supply Upgrade for Legacy Lithography Equipment to Restore Stable Mercury Lamp Ignition and Prevent Production Downtime

Equipment Upgrade and Retrofit Case Study

Equipment Upgrade and Retrofit Case Study

Retrofit Service Case

Power Supply Upgrade for Legacy Lithography Equipment to Restore Stable Mercury Lamp Ignition and Prevent Production Downtime

This case describes M&R Technology’s retrofit service for legacy lithography equipment, in which a power supply upgrade was implemented without altering the original system architecture or operating procedures. The solution successfully resolved unstable mercury lamp ignition issues, significantly reducing production downtime risk and improving overall equipment reliability.
Through compatibility assessment and system-level integration, the customer was able to extend the service life of existing equipment while avoiding the high cost of full system replacement.


Background and Requirement Definition

The customer had been operating a legacy lithography system for many years. Due to long-term operation, the performance of the original power supply had significantly degraded. In addition, the original manufacturer had discontinued the power module, making spare parts difficult to obtain. As a result, unstable mercury lamp ignition occurred frequently.
Once the lamp failed to ignite, the production line was forced to stop, increasing maintenance costs and directly impacting production schedules and delivery capability. A practical and reliable upgrade solution was urgently required.

Engineering Constraints and Integration Challenges

Because the lithography system was still required for ongoing production, the retrofit had to be completed without interrupting existing line operations or changing established operating procedures.
At the same time, the new power module needed to maintain a high level of compatibility with the existing control system in terms of electrical specifications and I/O configuration, in order to avoid introducing new operational risks. This upgrade was not a simple component replacement, but a comprehensive engineering evaluation and integration task focused on long-term system stability and reliability.

Retrofit Solution and Technical Implementation

After a thorough evaluation, M&R Technology selected a high-performance, compatibility-optimized power module to replace the original unit. The control cabinet layout and I/O assignments were redesigned to allow seamless integration with the existing control system.
The entire retrofit process preserved the original operating logic and user interface, enabling the system to be brought back online immediately without additional operator training. This ensured a smooth transition and rapid restoration of normal production operations.

Test Results and Practical Benefits

Following completion of the retrofit, the equipment demonstrated stable performance during continuous operation testing. The mercury lamp ignition issue was fully resolved.
The production team confirmed a significant reduction in downtime risk, a noticeable decrease in maintenance frequency, and substantial improvements in overall equipment reliability and production stability.

Engineering Value and Customer Benefits

Through this retrofit upgrade, the customer successfully extended the service life of the existing lithography equipment while avoiding the high capital expenditure associated with full system replacement.
The solution delivered immediate benefits without impacting production operations, providing a cost-effective, reliability-focused enhancement to the production line.

Engineering Conclusion

By upgrading the power supply without modifying the original system architecture, this retrofit service effectively resolved mercury lamp ignition failures caused by aging power components. The solution ensured continuous production operation and significantly improved overall equipment reliability.

Retrofit Service Case | M&R NANO TECHNOLOGY

M&R NANO TECHNOLOGY develops semiconductor & optoelectronic process equipment for global markets. Backed by 25 years of precision manufacturing and R&D support, we help clients source advanced systems that combine stable quality, automation integration, and high efficiency.

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