Operation and Daily Precautions

What should be noted during daily operation of an exposure tool?

• When replacing a mercury lamp, be sure to check and confirm the correct polarity.
• Before igniting the UV lamp, confirm that the exhaust fan is operating properly, and check whether the open-circuit voltage and current are normal and whether the accumulated operating hours have exceeded the lamp’s service life.
• Before operating the system, check whether positive and negative pressure conditions are normal.
• After replacing the mask holder, ensure all screws are securely tightened to avoid shift issues during contact exposure.

Power-on and lamp ignition sequence

Before powering on the system, ensure that N₂, compressed dry air (CDA), and vacuum functions are operating normally. Then power on the equipment, turn on the power supply unit, ignite the mercury lamp, and wait until the lamp system stabilizes.

What precautions should be taken when the UV lamp is on?

When igniting the UV lamp, always confirm that the exhaust fan is operating properly.

What precautions should be taken when replacing a mercury lamp?

When replacing a mercury lamp, clean cleanroom-grade latex gloves must be worn, and direct contact with the lamp bulb must be avoided.

Mercury Lamp and Light Source Troubleshooting

What are possible reasons why a mercury lamp does not ignite?

• Check whether the operating hours have exceeded the lamp’s service life.
• Check whether the lamp tube has cracks.
• Check whether heat dissipation is functioning properly.

How long can a mercury lamp be used?

The service life of a mercury lamp mainly depends on the number of ignition cycles and total operating hours.
Under normal operating conditions, service life varies by lamp power rating (350W, 500W, 1000W, 2000W, and 5000W).
Please note that exposure systems contain multiple optical components, most of which are coated with specialized optical films. These coatings may degrade over time due to temperature, humidity, and pH conditions. Regular inspections of functionality and appearance are recommended, with records maintained. If any issues are identified, please consult professional M&R support directly.

Troubleshooting and Maintenance

If the system suddenly stops and cannot be reset, what should be the first step?

First, check the alarm codes and error logs. Confirm whether external utility supplies (power, vacuum, cooling water, and nitrogen) are abnormal, then attempt a system reset.

If the system encounters an abnormal condition and cannot be reset, how should it be handled?

• Review the alarm messages and identify the abnormal point based on the information provided.
• Power off the system for 5–15 minutes, then power it back on for initialization.
• Contact the original equipment manufacturer (OEM) for support.

How should PLC communication abnormalities be checked?

First, confirm whether the communication interfaces (EtherCAT / Profibus / RS-485 / Ethernet) are functioning properly. Check cables and connectors for disconnection or poor contact. Verify whether the PLC status indicators (RUN/ERR LEDs) are illuminated correctly.

How should an interlock that cannot be released be handled?

Check the alarm messages on the PLC or HMI. Manually inspect sensors (pressure switches, contact signals) for abnormalities, and confirm that physical conditions of the equipment (such as doors being fully closed) are satisfied.

How should motor abnormalities (such as overcurrent or overheating) be diagnosed?

Check the drive alarm codes, measure whether the three-phase motor currents are balanced, and verify that cooling water or fans are operating normally. If abnormalities persist, the drive module or motor should be replaced.

What should be inspected in the electrical control system during periodic maintenance?

Cooling fan filter cleaning and PLC battery voltage inspection.

What utilities must be provided by the facility for exposure tools?

Typically, stable CDA at 4–6 kg, N₂ at 3–5 kg, and electrical power supply are required. Depending on equipment specifications, either single-phase 220 V or three-phase 220 V power is needed, with current requirements ranging from 15–50 A. Requirements may vary by equipment model.

Other mechanical abnormalities and troubleshooting methods

• Cylinder speed variation: Check whether positive pressure is normal or if there are air leaks.
• Unresponsive buttons: Button failure or wiring disconnection.
• No light during exposure: Check the power system, power switches, and mercury lamp status.
  (Please contact our engineers for maintenance and corrective actions.)