M&R NANO TECHNOLOGY CO., LTD. - Specialized Semiconductor and Optoelectronic Equipment for Yellow-Light Processes

Common Engineering and R&D Questions | M&R NANO TECHNOLOGY Semiconductor & Optoelectronic Process Equipment

This section focuses on the engineering design and system integration of exposure equipment, covering technical topics such as light source management, illumination measurement, equipment structure, and control architecture. By analyzing key equipment modules and design considerations from an engineering and R&D perspective, it helps users make more appropriate technical decisions during process development and equipment optimization. Choose M&R NANO TECHNOLOGY for high-quality semiconductor & optoelectronic process equipment and reliable customized manufacturing.

Common Engineering and R&D Questions

Common Engineering and R&D Questions

Common Engineering and R&D Questions

This section focuses on the engineering design and system integration of exposure equipment, covering technical topics such as light source management, illumination measurement, equipment structure, and control architecture. By analyzing key equipment modules and design considerations from an engineering and R&D perspective, it helps users make more appropriate technical decisions during process development and equipment optimization.

Light Source, Illumination, and Measurement

An exposure tool has a light source power of 200 W and an exposure area of 100 cm². What is the illumination intensity?

The calculation method is power divided by area:
200 ÷ 100 = 2 W/cm².

How can exposure energy delivery be confirmed during exposure?
    There are two methods:
  • Calculate the required exposure time based on a preset illumination value to reach the target energy
  • Use a sensor to monitor and accumulate exposure energy in real time
What items should be checked when illumination intensity degrades?
    UV lamp (mercury lamp) aging or abnormal degradation inspection items:
  • Check whether the UV lamp (mercury lamp) power, voltage, and current are correct (standard values can be referenced from the lamp housing).
  • Verify whether the UV lamp (mercury lamp) position is correct; X, Y, and Z axes should be adjusted to the optimal position.
  • Check whether the reflector has oxidation.
  • Check whether the fly-eye lens shows haze or fogging.
  • Replace the UV lamp (mercury lamp) to confirm whether there are defects.
  • Verify whether the illumination meter is functioning properly.
How long can a mercury lamp be used?

The service life of a mercury lamp mainly depends on the number of ignition cycles and total operating hours.
Under normal operating conditions, service life varies by power rating: 350W, 500W, 1000W, 2000W, and 5000W.
Please note that exposure systems include multiple optical components, most of which are coated with specialized optical films. These coatings may degrade over time due to temperature, humidity, and pH conditions. Regular inspections of functionality and appearance are recommended, with proper records maintained. If any issues arise, please consult M&R professionals directly.

What is the lifetime of a 2 kW mercury lamp?

The lifetime of a 2 kW mercury lamp is approximately 1,000 hours.

How long should one wait before re-igniting a mercury lamp after it is turned off?

After turning off the mercury lamp, a waiting time of 30 minutes is required before re-ignition.

Equipment Structure and Key Modules

What is the function of the Flag?

The Flag is a retractable or rotating component with a ceramic ball mounted at the front. During substrate and mask leveling, the ceramic ball serves as a contact medium between the substrate and the mask, preventing photoresist contamination of the mask.

What is a Mask Holder?

A Mask Holder is a platform used to secure the photomask. After positioning, the mask is held in place using vacuum suction.

How is a photomask replaced?

Exposure tools can be classified into top-mounted and bottom-mounted mask configurations.

For top-mounted systems, the mask is directly vacuum-mounted on top of the Mask Holder. Mask replacement is performed by releasing the vacuum, placing a new mask, and reapplying vacuum.
For bottom-mounted systems, the Mask Holder must be pulled out and flipped over, the vacuum released, the mask replaced, and then the Mask Holder reinstalled.
Additionally, our company provides a dedicated mask replacement fixture for bottom-mounted systems, allowing easy mask replacement without removing the Mask Holder.

What operational parameters should be considered for exposure equipment?

Chip flatness and alignment accuracy between the mask and the chip.

Control Systems and Automation

What type of control system architecture is commonly used in exposure tools?

Typically, a combination of an Industrial PC (IPC), PLC, and motion control card is used.
The IPC handles algorithms and the human–machine interface (HMI), the PLC manages safety logic, and the motion control card controls high-speed stage movements.

What architecture is used for automated equipment systems?

Industrial PCs communicate with equipment and host systems using communication protocols such as SECS/GEM.

Which communication protocols are used in automation systems (SECS/GEM)?

Industrial PCs use SECS/GEM protocols to communicate with equipment and the host control system.

Common Engineering and R&D Questions | M&R NANO TECHNOLOGY

M&R NANO TECHNOLOGY develops semiconductor & optoelectronic process equipment for global markets. Backed by 25 years of precision manufacturing and R&D support, we help clients source advanced systems that combine stable quality, automation integration, and high efficiency.

Our production structure is built around the needs of clients who require reliable equipment across multiple optoelectronic and semiconductor applications. From photomask design and manufacturing to customized equipment solutions, M&R NANO TECHNOLOGY focuses on manufacturing that improves workflow efficiency, supports strict Class 1000 cleanroom testing quality, and strengthens operational value.

For international buyers, M&R NANO TECHNOLOGY offers more than isolated machines. We provide a manufacturing partnership shaped by responsive communication, flexible automation integration, and proactive after-sales maintenance support. This helps customers build stronger production lines with dependable equipment, practical customized positioning, and factory-direct quality they can confidently rely on.