Exposure Machine

Exposure Machine for lithography pattern transfer, critical equipment.

Exposure Machine for lithography pattern transfer, critical equipment.

Exposure Machine

Exposure Machine is one of the core pieces of equipment in semiconductor photolithography, primarily used to transfer circuit patterns from a photomask onto a photoresist-coated wafer with high precision. It operates by using a specific wavelength light source and a projection optical system to reduce and project the mask pattern onto the wafer, thereby altering the chemical properties of the photoresist for subsequent development and pattern formation.


Exposure tools require extremely high resolution, alignment accuracy, and process stability, with nanometer-level overlay capability and precise light source control. As semiconductor manufacturing advances, exposure technologies have evolved from deep ultraviolet (DUV) to extreme ultraviolet (EUV), making these tools critical for improving chip performance and manufacturing yield, and indispensable in modern semiconductor fabrication.

Exposure Machine

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Manual Mask Aligner - M&R's manual Mask Aligner comes in both desktop and floor-standing designs.
Manual Mask Aligner

M&R's manual mask aligners are suitable for 2” to 6” wafers, with an XY travel of up to 200mm....

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Semi-automatic Mask Aligner - Semi-automatic Mask Aligner
Semi-automatic Mask Aligner

Semi-automatic Mask Aligners are invaluable equipment in R&D labs, small-scale production lines,...

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Automatic Mask Aligner - Automatic Mask Aligner
Automatic Mask Aligner

Automatic Mask Aligners are indispensable equipment in mass production processes and high-precision...

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Laser Direct Imaging (LDI) System - LDI Exposure machine
Laser Direct Imaging (LDI) System

Laser Direct Imaging (LDI) is a technology that uses laser light to directly draw patterns...

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Exposure Machine | M&R NANO TECHNOLOGY Custom Semiconductor & Optoelectronic Process Equipment

M&R NANO TECHNOLOGY offers a focused range of semiconductor & optoelectronic process equipment and related systems. Our main categories include Exposure Machine, Mask Aligners, Spin Coaters, and Developers, helping buyers quickly identify the right equipment for semiconductor, optoelectronic, and testing applications.

Each category is planned around real market demand for high-quality process equipment, combining our 25 years of manufacturing expertise with practical equipment design, automation capabilities, and strict Class 1000 cleanroom testing. This makes it easier for industry clients to source systems that match both functional expectations and long-term production requirements.

By organizing our product categories around professional use, M&R NANO TECHNOLOGY gives buyers a clearer way to explore semiconductor & optoelectronic process equipment with dependable R&D support and consistent equipment planning. The result is a category lineup that is practical for sourcing, easy to understand, and useful for international high-tech manufacturing customers.