Wafer Spin Wash Machine (Automatic - Floor type)

Product Number : SWA

Wafer Spin Wash Machine (Automatic - Floor type)

L 1175mm x D 700mm x H 1100mm

Equipment Summary：

for size 2 "-12" Wafer Substrates

Specifications：

• Exterior Material: Body assembly using SUS304 glossy material
• Equipment framework: Aluminum framework assembly, strong structure
• Cup: SUS304 glossy steel cup structure
• Cup lid clamshell: Cylinder drive, cup lid unclosed that cylinder cannot be rotated
• Sucker: Anodized aluminum sucker, with anti-acid functional, flat surface sucker
• Working window: Use PVC or glass material, master work
• Exhaust system: Direct ventilation design, and at the same time reducing odor
• Discharge waste liquid system
• Motor: AC Motor (speed: 30 ~ 1800 RPM)
• Arm: Swing diameter AC Motor
• Machine Safety

Electronic Control System:

• Software: PLC Programmable Automation Controller
• Using the control panel: HMI (Human Machine Interface)
• Using the control panel: HMI (Human Machine Interface)
• Setting the number of segments: Each recipe has a 7-segment module
• Settable acceleration and control time
• Password setting: According to the permissions set password protection