Monorail Automatic Aligner
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Monorail Automatic Aligner
Applicable Substrate Size :
- Semiconductor/MEMS/LED/Passive Component)
- Touch Panel/Display Panel
- substrate size2”~8”、8”~12”
- Fully Auto Alignment
- Auto Loading /Unloading
- Light Source
- Exposure light source：350W, 500W, 1000W, 2000W
- Exposure area：6”~12”
- Uniformity：≧3% to ≦5%
- Alignment System
- Alignment Accuracy：±1um
- Alignment Target：Customer designed
- X axis range：±70mm
- Y axis range：±15mm
- Z axis range：±10mm
- Exposure Gap：up to 1000um
- Gap Adjustment Resolution：1um
- Alignment Stage
- X axis range：±5mm
- Y axis range：±5mm
- θ axis range：±3°
- Axis resolution：0.1um
- Wafer Handing
- Robot Handing
- Wafer Size：2”~200mm
- Throughput：＞105wph
- High precision prealigner